UL6000 Fab Series

Helium Leak Detector Series for Semiconductor Applications

The INFICON UL6000 Fab Product Series is designed to meet the most critical and demanding leak detection applications. Featuring INFICON proprietary software algorithms I·CAL and HYDRO·S in a field-proven vacuum design, the UL6000 provides testing flexibility, high sensitivity and quick accurate results making any leak detection application fast and easy.

The UL6000 delivers fastest response times in all measurement ranges and extremely short cycle times in reaching test conditions and final results. The specially designed vacuum architecture provides the continuous high helium pumping speeds and the extremely fast response times you demand.

Efficient leak testing

Leak detection is both time-consuming and complex. By measuring rate-of-rise, semiconductor- and vacuum equipment is continuously monitored during operation. Upon leak indication by this integral leak test, leak positions are then localized using the helium spraying method allowing for the required repair. This is followed by another leak test using pressure increase or so-called vacuum decay measurement – an intricate process which needs to be repeated until all leaks are detected. Moreover, to be as precise as possible, measurement times for this procedure are often particularly long for large equipment volumes. Thanks to I·RISE, our Intelligent Rate-of-rise feature, the UL6000 Fab PLUS performs pressure increase measurement all by itself and combines it with the helium spraying method. Our patented system enables measurement times to drop drastically, and thus helps minimize both general time for leak testing and fab equipment maintenance. Experience even faster and more precise measurement results – in under 10 seconds, independent of chamber volume.