UL1000 / UL1000 Fab

The Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing

The INFICON UL1000 Helium Leak Detector Series is the renowned standard when it comes to economic helium vacuum leak testing in industrial (UL1000 with oil-sealed fore vacuum pumps) or semiconductor environments (UL1000 Fab with dry compressing fore vacuum pumps).

The UL1000 Series provides the best compromise between high performance, unparalleled robustness, and affordability. It delivers state-of-the art detection limits of 10^-12 mbar*l/s combined with reasonable short pump down and response time. The compact design ensures high maneuverability facilitating easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) allows for continuous leak testing within at least two decades lower than existing background levels. 

These features collectively reduce the duration of your leak testing process while ensuring all leaks are detected efficiently and economically.

With the addition of the TC1000 Test Chamber accessory, the UL1000 Helium Leak Detector Series provides easy, fast and accurate testing of hermetically sealed parts like IC packages, quartz crystals and laser diodes (according to MIL-STD 883, Method 1014).

Essential Accessories: SMART-Spray, SPRAY-Check

The SMART-Spray helium spray gun enhances leak checking by eliminating the need for large helium cylinders and cumbersome hoses. It streamlines the process, reducing manual helium flow adjustments and minimizing errors. This tool makes leak detection faster, easier, and more reliable while maintaining low helium consumption and background levels. Ideal for efficient and precise leak testing.

SPRAY-Check, a spray on test leak, ensures the functionality and readiness of your leak detector. Ideal for the 10⁻⁹ to 10⁻⁸ mbar∙l/s range, it provides reliable checks during testing processes.